Glass micromachining is becoming an essential material for optical micro-electro-mechanical-systems (MOEMS), miniaturized total analysis systems (µTAS), and microfluidic devices (e.g., for biosensing). In particular, the machining of smooth, high aspect ratio through glass vias (TGVs) in glass is crucial for the fabrication of interposers in the emerging packaging industry for small consumer electronics. However, glass is challenging to machine, in particular, at the micro-scale. Due to its brittleness, mechanical processes often result in undesired micro-cracks, and its relatively high thermal conductivity challenges the thermal process, which faces the issue of thermally affected zones. Additionally, its amorphous structure makes it difficult to etch high aspect-ratio structures. These challenges stimulate research in industry and academia, and, in recent years, this field has seen major advances.
This special issue seeks reviews, regular research papers and short communication on: (i) new approaches to micro machine glass, (ii) innovative use of existing techniques to address current challenges in glass micro-machining and (iii) opinions on future needs in glass micro-machining in emerging markets.
Prof. Dr. Rolf Wuthrich
Department of Mechanical and Industrial Engineering, Concordia University,
Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. Papers will be published continuously (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.
Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are refereed through a peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed Open Access monthly journal published by MDPI.
- Glass micro-machining
- Glass micro/nano devices