Glass Chip Design Guide- Dolomite Microfluidics
Glass Microfluidic Chip from Dolomite-Microfluidics
1 Summary 2
2 Fabrication processes 3
2.1 Fabrication process summary 3
2.2 Isotropic etching 3
2.3 Drilling holes 4
2.4 Glass layer thickness 4
2.5 Fusing process 5
2.5.1 Cold bonding 5
2.5.2 Fusing two etched layers 5
2.5.3 Multiple layer chips 6
2.6 Integrated electrodes 7
2.7 Dicing 8
3 Device design guide 9
3.1 Designing with lines 9
3.2 Designing with polygons 10
3.3 Creating raised features 11
4 Drawing file format 12
4.1 Rules for DXF or DWG wafer designs 12
4.2 Layout of devices on a wafer 13
4.2.1 Example layout 14
4.3 Designing chips with an edge connection 15
4.4 Designing chips for use with the 4-way linear connector and top connector base 16
4.5 Designing chips for use with the 8-way and 12-way linear connector and top connector base 17
4.6 Designing chips for use with the circular connector 18
Design examples 19
4.7 Channel constriction 19
4.8 On-chip filter 20
PDF Document: Glass Chip Design Guide
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